Laminated capacitor formed in thermoplastic resin substrate by laser-assisted micropowder jet implantation

Katsuhiko Suzuki, Shotaroh Kameya, Tohru Sugai, Takumi Ohuchi, Kaichi Miura, Tsunemoto Kuriyagawa

研究成果: Article査読

抄録

A laminated capacitor has been formed in a poly(oxymethylene) substrate of the thermoplastic resin by a laser-assisted micro powder jet implantation method. A carbon powder and a BaTiO3 powder were jetted for an electrode and a dielectric in turn with Ar gas while irradiating a Nd:YAG laser on the substrate, respectively. It was confirmed that the capacitance formed by this method was proportional to size of electrode areas and number of laminations. The dielectric constant estimated experimentally showed a large value of 5:2 × 103, which was probably enhanced by BaTiO3 particles crushed to a particle size of approximately 150nm through the jetting process. It was found that the capacitance showed an exponential dependence against the coming and going repetition number of times of powder jetting at formation of the dielectric layer, which is probably affected by both the increase in the thickness and the decrease in the dielectric constant according to the number of dielectric laminations.

本文言語English
論文番号06GL02
ジャーナルJapanese journal of applied physics
52
6 PART 2
DOI
出版ステータスPublished - 2013 6

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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