An FeNi film with a metastable L10-ordered phase was fabricated by an alternate monatomic layer deposition. An Fe monolayer and a Ni monolayer were alternately grown on a Cu0.6Ni0.4 binary buffer layer. A (001) L10-FeNi superlattice peak, which indicates the formation of a L10 phase, was clearly observed by an X-ray diffraction. A long-range order parameter S of L10-FeNi was estimated to be 0.5 0.1. It was found that the film has a uniaxial magnetic anisotropy along c-axis by magnetization measurement. The uniaxial magnetic anisotropy energy Ku was evaluated to be (5.0 0.1) × 106 erg/cc.
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