We report on the use of CoFeTaB metallic glass thin film as a soft magnetic underlayer which promotes the growth of L10 FePt along the preferred (111) crystallographic direction. The preferred oriented phase of L1 0 FePt is obtained by either in situ deposition upon a heated CoFeTaB/SiO2/Si or at room temperature (FePt/CoFeTaB/SiO 2/Si) followed by annealing at 400-450 C for 15 min. The latter process is shown to be advantageous in terms of the fabrication of patterned media. Pattern sizes ranging from 25-100 nm made from L10 FePt (111)/glassy CoFeTaB were fabricated by photo/electron beam lithography. The structural and magnetic characterizations strongly suggest the applicability of the present bilayered structure in the fabrication of high density bit-patterned magnetic recording media.
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