KrF excimer laser induced selective non-planer metallization

Shigeo Maeda, Kazuyuki Minami, Masayoshi Esashi

研究成果: Conference contribution

11 被引用数 (Scopus)

抄録

Selective non-planer metallization method was developed. Ultraviolet photochemical deposition of chromium from gas phase precursors provided superior resolution, but deposited film was contaminated with carbon and oxygen and showed low electrical conductivity. Another type of metal line patterning process using KrF excimer laser induced chromium deposition was developed. Chromium film deposited was used as a mask material for patterning of the underlying nickel film. Nickel film was coated by electroless plating method which is suitable for three dimensional structure. This selective non-planer metallization process could be used in our project for smart catheters. As an example of smart catheters, tactile sensor was proposed and fabricated at the end of catheter. The structure of tactile sensor was shaped by excimer laser ablation process. The electrodes and the metal lines of tactile sensors were patterned using laser induced process.

本文言語English
ホスト出版物のタイトルAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
出版社Publ by IEEE
ページ75-80
ページ数6
ISBN(印刷版)078031834X
出版ステータスPublished - 1994 1 1
イベントProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
継続期間: 1994 1 251994 1 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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