Formation processes of intermetallic compounds on annealing of Sb-Mn two-layer thin films were studied by means of the helium ion backscattering technique, X-ray diffractometry and magnetic measurement. In the initial stage interdiffusion begins to form a MnSb film at the Sb/Mn interface, independently of the film composition. If a film contains enough Mn to form Mn2Sb at the final equilibrium, the MnSb formation proceeds as the first step of the reaction until Sb is completely consumed, and then the remaining Mn diffuses into the MnSb film to form Mn2Sb. The second step of the reaction has been found to be quite different from the first one in the mode of diffusion.
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