To improve electric properties of oxide ion conducting yttria-stabilized zirconia (YSZ) films at low temperatures, a mechanical distortion was induced by a piezoelectric actuator. YSZ films containing 8 mol%Y2O3 were prepared by metalorganic chemical vapor deposition. The YSZ film was placed on a PZT (lead zirconate titanate) multilayer piezoelectric actuator. The effect of piezoelectric vibration on electric properties of the YSZ film was investigated. The resistivity of the YSZ film decreased with increasing amplitude of the piezoelectric vibration. Electrical conductivity of the YSZ film at 353 K vibrated by the actuator was 2 × 10-6 Sm -1, 103 times greater than that without vibration.
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