Investigation of nonreactive fluoroalkyl-containing surfactants for reducing release energy of ultraviolet-cured acrylate resins

Masaru Nakagawa, Ayako Endo, Yoshitaka Tsukidate

    研究成果: Article査読

    6 被引用数 (Scopus)

    抄録

    The authors investigated the types of additive nonreactive fluorinated surfactants that effectively decrease the release energy of a certain ultraviolet-cured base resin for radical photopolymerization. The release energies of resins containing various surfactants were compared in two atmospheres, namely air and 1,1,1,3,3-pentafluoropropane (PFP, HFC-245fa). Tridecafluoro-1,1,2,2-tetrahydrooctan-1-ol functioned as the most effective surfactant under an air atmosphere, for detachment of a silica surface modified with tridecafluoro-1,1,2,2-tetrahydrotrimethoxysilane from the cured resins. Under a PFP atmosphere, heptadecafluoro-1,1,2,2-tetrahydrodecan-1-ol with a longer fluoroalkyl chain was necessary to effectively decrease the release energy. It was indicated that the segregation of liquid fluoroalkyl alcohols between the cured resin and modified mold was effective in decreasing the release energy of cured resins.

    本文言語English
    論文番号06FB10
    ジャーナルJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
    30
    6
    DOI
    出版ステータスPublished - 2012 11月

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 器械工学
    • プロセス化学およびプロセス工学
    • 表面、皮膜および薄膜
    • 電子工学および電気工学
    • 材料化学

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