Intrinsic position sensing of a Ni-Mn-Ga microactuator

D. Auernhammer, M. Kohl, B. Krevet, Makoto Ohtsuka

研究成果: Article査読

10 被引用数 (Scopus)


This paper presents an investigation of the intrinsic magnetoresistance of a ferromagnetic shape memory alloy microactuator for position sensing. The microactuator is designed as a double-beam cantilever made of a polycrystalline Ni-Mn-Ga thin film, which exhibits both a martensitic transformation in the temperature range 333-359K and a ferromagnetic transition at about 370K. The microactuator is placed in the inhomogeneous magnetic field of a miniature Nd-Fe-B magnet causing a mixed thermo-magnetoresistance effect upon actuation. The maximum in-plane magnetic field is about 0.38T. In this case, the maximum magnetoresistance is 0.19%. Under these conditions, a maximum positioning accuracy of 18νm can be reached within the deflection system presented.

ジャーナルSmart Materials and Structures
出版ステータスPublished - 2009 11 9

ASJC Scopus subject areas

  • Signal Processing
  • Civil and Structural Engineering
  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering

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