Interface structure of face-centered-cubic-Ti thin film grown on 6H-SiC substrate

Y. Sugawara, N. Shibata, S. Hara, Y. Ikuhara

    研究成果: Article査読

    29 被引用数 (Scopus)


    A titanium thin film was deposited on the flat (0001) face of a 6H-SiC by electron beam evaporation at room temperature in a vacuum of 5.1 × 10-8 Pa. The Ti film was epitaxially grown on the surface, and the interface between Ti and SiC was characterized by high-resolution electron microscopy. It was found that the structure of the deposited titanium is face-centered cubic (fcc), although bulk titanium metal usually has a hexagonal close-packed or body-centered cubic crystal structure. We believe that the unusual fcc structure of Ti thin film is due to the high adhesion of the film to the substrate and the high degree of coherency between them. The orientation relationship of the fcc-Ti/6H-SiC interface was (1 1 1)fcc-Ti//(0001)6H-SiC and [1̄10]fcc-Ti//[112̄0]6H-SiC. Preliminary calculations indicate that this orientation relationship maximizes the lattice coherency across the interface.

    ジャーナルJournal of Materials Research
    出版ステータスPublished - 2000 10

    ASJC Scopus subject areas

    • 材料科学(全般)
    • 凝縮系物理学
    • 材料力学
    • 機械工学


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