The interface structures and the chemical states between the Pt layer and polar-ZnO single crystal were investigated. Two-dimensional x-ray diffraction images revealed that Zn-polar ZnO had less mosaicity than the O-polar one. Angle-resolved hard x-ray photoelectron spectroscopy was used to investigate the chemical states of the interface. At the interface of the Pt/Zn-polar ZnO, zinc diffusion into the Pt layer, forming PtZn and ZnPtO bonds, was found. For the O-polar ZnO, in contrast, PtO was predominantly formed at the interface. Zinc diffusion prevented oxidization of the Pt layer and affected the mosaicity of the interface.
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