Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology

Takeshi Hayasaka, Shinya Yoshida, Kumi Y. Inoue, Masanori Nakano, Tomohiro Ishikawa, Tomokazu Matsue, Masayoshi Esashi, Shuji Tanaka

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

This paper reports a complementary metal oxide semiconductor (CMOS)-based 20×20 amperometric biosensor array using boron-doped diamond (BDD) microelectrodes with excellent electrochemical properties. The BDD electrodes were once formed on a Si wafer at 800°C, and then transferred to a 0.18 μm CMOS wafer with a benzocyclobutene (BCB) bonding interlayer. As a result, the BDD microelectrodes were arrayed without damage in the CMOS LSI circuit. The fully-integrated device could detect histamine and dopamine owing to a wide potential window of the BDD electrode, and offered 2-dimensional real-time imaging of histamine diffusion in a solution.

本文言語English
ホスト出版物のタイトルMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ322-325
ページ数4
ISBN(印刷版)9781479935086
DOI
出版ステータスPublished - 2014 1 1
イベント27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
継続期間: 2014 1 262014 1 30

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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