Integration of ceramic catalyst on micro-thermoelectric gas sensor

Woosuck Shin, Maiko Nishibori, Kazuki Tajima, Lionel F. Houlet, Yeongsoo Choi, Noriya Izu, Norimitsu Murayama, Ichiro Matsubara

研究成果: Article査読

22 被引用数 (Scopus)

抄録

An integration technique of dispensing ceramic paste containing the particles of Pt loaded on alumina (Pt/alumina) on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS) has been developed. By changing the concentration of the catalyst particles in the paste, the viscosity of the paste was controlled to prepare the thick film catalyst of different thicknesses. The thickness of the catalyst was closely related to both the gas sensing performance and its temperature dependency of the μ-THS device. The sensor device with the moderate concentration of the Pt/alumina catalyst particle in the paste, 3.8% (v/v), showed the voltage signal of ca. 10 mV for the gas mixture of hydrogen/air, 1% (v/v) H2 in air at catalyst temperature of 100 °C. The performances of the μ-THS with ceramic thick film catalyst and Pt thin film catalyst have been compared, and the influences of CO gas on their sensing performance have been investigated using in situ FT-IR test method. The better gas oxidation performance of the ceramic thick film than that of Pt thin film could remove out the adsorbed CO on the catalyst surface.

本文言語English
ページ(範囲)283-291
ページ数9
ジャーナルSensors and Actuators, B: Chemical
118
1-2
DOI
出版ステータスPublished - 2006 10 25
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

フィンガープリント

「Integration of ceramic catalyst on micro-thermoelectric gas sensor」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル