Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

P. Li, T. Sasaki, L. F. Pan, K. Hane

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We demonstrate here the fabrication of integrated tracking (horizontal) and focusing (vertical) micro lens actuators which are implemented on silicon-on-insulator (SOI) wafer using silicon bulk micromachining. The micro actuators that consist of flexures, a lens holder and comb structures with electrodes can realize two-dimensional movements of one objective lens for optical storage applications. DC and frequency responses of the integrated tracking and focusing actuators with or without lens are experimentally demonstrated by applying voltage to the micro lens actuators. The displacements of the proposed actuators have good linearity versus the square of the voltages in tracking and focusing directions. These experimental results show good agreement with theoretical predictions.

本文言語English
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ1546-1549
ページ数4
DOI
出版ステータスPublished - 2011 9月 1
イベント2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
継続期間: 2011 6月 52011 6月 9

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
国/地域China
CityBeijing
Period11/6/511/6/9

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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