Integrated micro flow control systems

Masayoshi Esashi

研究成果: Article査読

55 被引用数 (Scopus)

抄録

The integration of fluid control systems on a silicon wafer allows the control of a small volume of fluid by virtue of a negligible dead volume. Microvalves driven by small piezoactuators have been fabricated on a silicon wafer by micromachining. Three types, i.e. normally open, normally closed and three-way, were developed. An integrated mass flow controller consisting of a small thermal mass flow sensor and a normally closed microvalve was fabricated for precise gas control. The small thermal capacity of the flow sensor gives high sensitivity and quick response. The response time of the mass flow controller is less than 2 ms, which is faster than that of previous ones by nearly a thousand times. The integrated system gives rise to a precise flow control for advanced deposition processes, etc.

本文言語English
ページ(範囲)161-167
ページ数7
ジャーナルSensors and Actuators: A. Physical
21
1-3
DOI
出版ステータスPublished - 1990 1月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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