Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer

Yuki Shimizu, Ryo Aihara, Zongwei Ren, Yuan Liu Chen, So Ito, Wei Gao

研究成果: Article査読

18 被引用数 (Scopus)

抄録

This paper presents a detailed analysis on the influence of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer, which can fabricate two-dimensional grating structures in a single exposure. In an ideal condition, defect-free two-dimensional grating structures can be fabricated by the interferometer. However, in a real case, visible stripes caused by misalignment errors of the optical components in the interferometer always appear on the fabricated grating structures. In this paper, theoretical analysis and experiments are carried out to analyze the influences of the misalignment errors of the optical components in the orthogonal two-axis Lloyd's mirror interferometer.

本文言語English
ページ(範囲)27521-27535
ページ数15
ジャーナルOptics Express
24
24
DOI
出版ステータスPublished - 2016 11 28

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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