Influence of substrate bias voltage on properties of Pt thin films deposited by non-mass separated ion beam deposition method

Joon Woo Bae, Jae Won Lim, Kouji Mimura, Masahito Uchikoshi, Mitsuhiro Wada, Makoto Ikeda, Minoru Isshiki

研究成果: Article査読

フィンガープリント 「Influence of substrate bias voltage on properties of Pt thin films deposited by non-mass separated ion beam deposition method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy