Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano, Thang Hung Dinh, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Atsushi Sunahara, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Kazuyuki Sakaue, Taisuke Miura, Gerry O'Sullivan, Takeshi Higashiguchi

    研究成果: Article査読

    5 被引用数 (Scopus)

    抄録

    We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

    本文言語English
    論文番号070311
    ジャーナルJapanese journal of applied physics
    57
    7
    DOI
    出版ステータスPublished - 2018 7

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)

    フィンガープリント

    「Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

    引用スタイル