Influence of laser power on the orientation and microstructure of CeO 2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

研究成果: Article査読

14 被引用数 (Scopus)

抄録

CeO 2 films were prepared on LaMnO 3 /MgO/Gd 2 Zr 2 O 7 multi-coated Hastelloy C276 tapes by laser chemical vapor deposition at different laser power (P L ) from 46 to 101 W. Epitaxial (1 0 0) CeO 2 films were prepared at P L = 46-93 W (deposition temperature, T dep = 705-792 K). Epitaxial CeO 2 films had rectangular-shaped grains at P L = 46-77 W (T dep = 705-754 K), while square-shaped grains were obtained at P L = 85-93 W (T dep = 769-792 K). CeO 2 films showed a columnar microstructure. Epitaxial (1 0 0) CeO 2 films with rectangular grains exhibited full width at half maximum of ω-scan on (2 0 0) reflection and φ{symbol}-scan on (2 2 0) reflection of 3.4-3.2° and 6.0-7.2°, respectively. The deposition rate of the epitaxial (1 0 0) CeO 2 films had a maximum of 4.6 μm h -1 at P L = 77 W (T dep = 754 K).

本文言語English
ページ(範囲)6395-6398
ページ数4
ジャーナルApplied Surface Science
256
21
DOI
出版ステータスPublished - 2010 8月 15

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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