Influence of annealing temperature on optical properties of titanium oxide thin films

Yaqi Hou, Daming Zhuang, Gong Zhang, Ming Zhao, Minsheng Wu

研究成果: Article査読

1 被引用数 (Scopus)

抄録

The influence of annealing temperature on optical properties of TiO2 thin films prepared using the mid-frequency AC magnetron sputtering technique was studied to design TiO2 thin film annealing process. The transmittance and reflectance spectra of TiO2 thin films on fused silica substrate were measured by a spectrophotometer. The reflective indices of the films were calculated using the envelope method and the extinction coefficients were determined using the empirical formula method. The results show that the refractive index of the TiO2 thin films increases with annealing temperature while the film extinction coefficient decreases a little at lower annealing temperatures. The TiO2 thin film annealed at 500°C has the best optical properties.

本文言語English
ページ(範囲)1441-1443
ページ数3
ジャーナルQinghua Daxue Xuebao/Journal of Tsinghua University
43
11
出版ステータスPublished - 2003 11月

ASJC Scopus subject areas

  • 工学(全般)

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