Particle-in-cell/Monte Carlo (PIC/MC) simulations were performed for radio frequency (RF) planar magnetron discharges of pure argon gas and an O2-Ar gas mixture. The number densities of Ar+ and O- ions drastically increased when oxygen was added to the Ar discharge gas. Moreover, the spatial distributions of positive ions, Ar+, O2+, and O+, had two peaks in the O2/Ar mixture discharge. The positive ions were distributed in such a way that the charge neutrality was kept in the plasma bulk, indicating that the behavior of Ar+ ions is influenced by the existence of O-ions. The mechanism of this phenomenon is herein clearly explained by visualizing results of the simulation.
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics