In-situ simultaneous observation of phase transition and electrical properties of Pb(Zr,Ti)O3 thin film by high temperature XRD and electrical measurement apparatus

Toru Onoue, Naoki Wakiya, Koichi Seo, Takanori Kiguchi, Nobuyasu Mizutani, Kazuo Shinozaki

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Pb(Zr0.05Ti0.95)O3/(La,Sr)CoO3 thin films were prepared by pulsed laser deposition (PLD) on SrTiO 3(001) substrates. Phase transition behavior of Pb(Zr 0.05Ti0.95)O3(PZT) was investigated using high temperature X-ray diffraction (HT-XRD) and high-temperature electrical measurement. The phase transition temperature of PZT thin film is larger than bulk one. In 100 and 200nm-thickness epitaxial PZT thin films, the phase transition temperatures obtained from X-ray diffraction measurement and electrical property measurement are in good agreement.

本文言語English
ページ(範囲)53-56
ページ数4
ジャーナルKey Engineering Materials
320
DOI
出版ステータスPublished - 2006
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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