In-situ Observation of Undevelopment Patterns in Atomic Force Microscope Liothography

Takao Shiokawa, Yoshinobu Aoyagi, Takashi Hanada, Takuo Sugano, Masatsugu Shigeno

研究成果: Article › 査読

本文言語	English
ページ（範囲）	677-678
ページ数	2
ジャーナル	Journal of Photopolymer Science and Technology
巻	8
号	4
DOI	https://doi.org/10.2494/photopolymer.8.677
出版ステータス	Published - 1995
外部発表	はい

ASJC Scopus subject areas

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AU - Shigeno, Masatsugu

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