In-flight particle characteristics in a DC-RF hybrid plasma flow system

Kohtaro Kawajiri, Hideya Nishiyama

研究成果: Article査読

8 被引用数 (Scopus)

抄録

In-flight particle characteristics are clarified experimentally for a DC-RF hybrid plasma flow for various operating pressures. A recirculation effect in a coil region becomes small for a DC-RF hybrid plasma flow, and particle velocity increases with decreasing operating pressure and the swirl gas ratio. Particles are heated effectively by increasing operating pressure and the swirl gas ratio. Multi-input and multi-objective optimization is conducted to obtain Pareto-optimal resolutions, in which particle velocity and particle temperature in the downstream region are maximized for high quality in-flight particle processing.

本文言語English
ページ(範囲)660-664
ページ数5
ジャーナルThin Solid Films
506-507
DOI
出版ステータスPublished - 2006 5 26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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