Fe-C-N (C = 0.9-2.5 at%, N = 0-16.5 at%) films have been formed on MgO single-crystal substrates using reactive sputtering. Impurity effect of C atoms on the structure and magnetic moment are discussed. The results can be summarized as follows: (1) In α′-Fe-C-N films, N and C atoms are interstially located along c direction. (2) Substituting N of α′-Fe16N2 by C, the phase decomposition temperature from α′ to α and γ′ increases with increasing C content. (3) σs decreases by substituting N of α′-Fe16N2 by C. (4) A giant magnetic moment in the Fe-N system does not originate from impurity effect of C atoms.
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