Improvement of thermal stability of magnetoresistive random access memory device with SiN protective film deposited by high-density plasma chemical vapor deposition

Katsumi Suemitsu, Yuichi Kawano, Hiroaki Utsumi, Hiroaki Honjo, Ryusuke Nebashi, Shinsaku Saito, Norikazu Ohshima, Tadahiko Sugibayashi, Hiromitsu Hada, Tatsuhiko Nohisa, Tadashi Shimazu, Masahiko Inoue, Naoki Kasai

研究成果: Article査読

23 被引用数 (Scopus)

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Engineering & Materials Science

Physics & Astronomy