Improvement of spatial resolution of a laser-scanning ph-imaging sensor

Motoi Nakao, Tatsuo Yoshinobu, Hiroshi Iwasaki

研究成果: Article査読

64 被引用数 (Scopus)

抄録

We investigated the spatial resolution of a laser-scanning semiconductor-based pH-imaging sensor both experimentally and theoretically. A spatial resolution better than 100 µ m was obtained by thinning the Si substrate to 100 µ m. The simulation results on the spatial resolution based on a carrier diffusion model agreed well with those obtained by experiment. From the simulation results, we also predicted the optimal choice of parameters of Si substrate (thickness, doping, etc.) for the pH-imaging sensor.

本文言語English
ページ(範囲)L394-L397
ジャーナルJapanese journal of applied physics
33
3
DOI
出版ステータスPublished - 1994 3
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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