Three-in. size LiCaAlF6 (LiCAF) single crystals were successfully grown by the Czochralski method. Both measurements of the transmission spectra in the VUV regions and the X-ray rocking curve analysis showed that the crystallinity of LiCAF single crystal was improved by the annealing. Optical absorption measurements in the UV/VIS spectral regions following X-ray irradiation were performed in order to compare the radiation damage with a lithography-grade CaF2 crystal.
ASJC Scopus subject areas
- コンピュータ サイエンス（全般）