Improved spatial resolution of the chemical imaging sensor with a hybrid illumination that suppresses lateral diffusion of photocarriers

Ko ichiro Miyamoto, Kosuke Seki, Takeyuki Suto, Carl Frederik Werner, Torsten Wagner, Michael J. Schöning, Tatsuo Yoshinobu

研究成果: Article査読

4 被引用数 (Scopus)

抄録

The chemical imaging sensor is a semiconductor-based chemical sensor capable of visualizing pH and ion distributions. The spatial resolution depends on the lateral diffusion of photocarriers generated by illumination of the semiconductor substrate. In this study, two types of optical setups, one based on a bundle of optical fibers and the other based on a binocular tube head, were developed to project a hybrid illumination of a modulated light beam and a ring-shaped constant illumination onto the sensor plate. An improved spatial resolution was realized by the ring-shaped constant illumination, which suppressed lateral diffusion of photocarriers by enhanced recombination due to the increased carrier concentration.

本文言語English
ページ(範囲)1328-1333
ページ数6
ジャーナルSensors and Actuators, B: Chemical
273
DOI
出版ステータスPublished - 2018 11 10

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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