The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.
|ジャーナル||Digests of the Intermag Conference|
|出版ステータス||Published - 2000 1月 1|
|イベント||2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can|
継続期間: 2000 4月 9 → 2000 4月 13
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