IMPEDANCE MEASUREMENTS TO STUDY SEMICONDUCTOR SURFACE AND THIN INSULATING FILMS ON ITS SURFACE.

Jun ichi Nishizawa, Mitsumasa Koyanagi, Mitsuteru Kimura

研究成果: Paper査読

抄録

To obtain information on the physical states of a semiconductor surface, the behavior of the carriers distributed near the surface was investigated by measuring the impedance of MOS diodes. In addition, an equivalent circuit for the semiconductor surface was constructed on the basis of the impedance and the admittance diagrams and some theories. A technique is proposed for obtaining of two metal electrodes, one set near the surface and the other on the bulk of the semiconductor.

本文言語English
ページ773-780
ページ数8
出版ステータスPublished - 1974 1 1
イベントInt Vac Congr, 6th, Proc - Kyoto, Jpn
継続期間: 1974 3 251974 3 29

Other

OtherInt Vac Congr, 6th, Proc
CityKyoto, Jpn
Period74/3/2574/3/29

ASJC Scopus subject areas

  • 工学(全般)

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