Hybrid model simulation of the cluster deposition process

Kenta Hongo, Hiroshi Mizuseki, Yoshiyuki Kawazoe, Luc T. Wille

研究成果: Article査読

4 被引用数 (Scopus)

抄録

We propose a hybrid model to simulate the cluster deposition process. This model consists of the direct simulation Monte Carlo and Monte Carlo methods that combine the macro with the nano scale. We investigate the effects of certain experimental parameters in cluster-formation process on the film morphology, including packing density. The model reveals that the morphology is strongly affected by the size distribution of the incident clusters. These results indicate the possibility of designing unique thin-film structures and properties.

本文言語English
ページ(範囲)429-433
ページ数5
ジャーナルJournal of Crystal Growth
236
1-3
DOI
出版ステータスPublished - 2002 3

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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