Hollow fiber delivery of ArF and KrF excimer laser light

Yuji Matsuura, Mitsunobu Miyagi

研究成果: Conference article査読

5 被引用数 (Scopus)


For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.

ジャーナルProceedings of SPIE - The International Society for Optical Engineering
出版ステータスPublished - 1999
イベントProceedings of the 1999 Specialty Fiber Optics for Medical Applications - San Jose, CA, USA
継続期間: 1999 1 241999 1 25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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