A highly sensitive two-dimensional strain sensor, which consists of area-arrayed bundles of multi walled carbon nanotubes (MWCNTs), has been developed by applying micro electro mechanical systems (MEMS) technology. The spatial resolution of the developed sensor was 0.5 mm which is superior to that of human finger, 1mm. Since the shape of the grown MWCNTs varies widely depending on the average thickness of the catalyst layer and the growth temperature, the optimum growth condition was investigated for forming the bundles of MWCNTs with vertical alignment and longer length. The change of the electrical resistance of the grown MWCNTs bundle was measured by applying a compression test in the strain range from 0% to -50%. It was found that the electrical resistance of the MWCNTs bundle increased almost linearly with the applied compressive strain and its strain sensitivity was about 100%/%-strain (gauge factor: 100). The MWCNT bundles with the aspect ration of 20 were grown by using the optimal growth conditions. This bundle structure showed the high load sensitivity of 10 mN as was expected. In addition, two-dimensional deformation distribution of the area-arrayed bundles was observed under the application of the concentric circular load.
|出版ステータス||Published - 2014 1 1|
|イベント||ASME 2014 International Mechanical Engineering Congress and Exposition, IMECE 2014 - Montreal, Canada|
継続期間: 2014 11 14 → 2014 11 20
|Other||ASME 2014 International Mechanical Engineering Congress and Exposition, IMECE 2014|
|Period||14/11/14 → 14/11/20|
ASJC Scopus subject areas
- Mechanical Engineering