Highly sensitive coplanar line thin-film sensor using SrTiO film

Hiroaki Uetake, Toshiya Kawakami, Shin Yabukami, Tetsuya Ozawa, Nobukiyo Kobayashi, Ken Ichi Arai

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr33Ti16O51) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.

本文言語English
論文番号6971665
ジャーナルIEEE Transactions on Magnetics
50
11
DOI
出版ステータスPublished - 2014 11 1
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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