抄録
Highly adherent tungsten-containing diamond-like carbon coating (W-DLC) was investigated. Two types of W-DLC coating are deposited onto a mirror-polished SMA substrate by PECVD and co-sputtering of the tungsten metal target. A DLC coating is also investigated for comparison. Uniaxial tensile tests are performed for these three types of coating and the peeled-off area is estimated visually. The best adherence was achieved with a WD40 film and the peeled-off area was estimated to be ~ 1% even after 10% tensile strain was applied to the coating. To evaluate the adhesive strength, scratching tests were carried out and, of the three, WD40 showed the highest adhesive strength. The higher adhesive strength of the DLC coating results from a reduction in internal stress and a lowering of coating hardness by the introduction of additional elements.
本文言語 | English |
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ページ(範囲) | 403-406 |
ページ数 | 4 |
ジャーナル | Diamond and Related Materials |
巻 | 18 |
号 | 2-3 |
DOI | |
出版ステータス | Published - 2009 2月 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 化学 (全般)
- 機械工学
- 材料化学
- 電子工学および電気工学