Highly (004)-oriented texture of γ-LiAlO2 films by laser chemical vapor deposition

Chen Chi, Hirokazu Katsui, Rong Tu, Takashi Goto

研究成果: Conference contribution

抄録

(004)-oriented γ-LiAlO2 films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (Tdep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (Ptot) of 100-200 Pa. The (004)-oriented γ-LiAlO2 films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO2 films reached to 65-72 μm h-1.

本文言語English
ホスト出版物のタイトルAdvanced Ceramics and Novel Processing
出版社Trans Tech Publications Ltd
ページ141-144
ページ数4
ISBN(印刷版)9783038351306
DOI
出版ステータスPublished - 2014
イベント5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China
継続期間: 2013 12 92013 12 12

出版物シリーズ

名前Key Engineering Materials
616
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

Other5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
国/地域China
CityWuhan
Period13/12/913/12/12

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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