High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing

Naoki Inomata; Takahito Ono

doi:10.1109/TRANSDUCERS.2017.7994212

High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing

Naoki Inomata, Takahito Ono

工学研究科・機械機能創成専攻

研究成果: Conference contribution

抄録

A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is -650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.

本文言語	English
ホスト出版物のタイトル	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	970-973
ページ数	4
ISBN（電子版）	9781538627310
DOI	https://doi.org/10.1109/TRANSDUCERS.2017.7994212
出版ステータス	Published - 2017 7月 26
イベント	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China 継続期間: 2017 6月 18 → 2017 6月 22

出版物シリーズ

名前	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域	Taiwan, Province of China
City	Kaohsiung
Period	17/6/18 → 17/6/22

ASJC Scopus subject areas

化学的な安全衛生
器械工学
電子工学および電気工学

文献へのアクセス

10.1109/TRANSDUCERS.2017.7994212

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引用スタイル

Inomata, N., & Ono, T. (2017). High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 970-973). [7994212] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994212

High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing. / Inomata, Naoki ; Ono, Takahito.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 970-973 7994212 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

研究成果: Conference contribution

Inomata, N & Ono, T 2017, High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994212, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 970-973, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 17/6/18. https://doi.org/10.1109/TRANSDUCERS.2017.7994212

Inomata N , Ono T. High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 970-973. 7994212. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/TRANSDUCERS.2017.7994212

Inomata, Naoki ; Ono, Takahito. / High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 970-973 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

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abstract = "A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is -650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.",

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note = "Funding Information: Part of this work was performed at the Micro/Nanomachining Research Education Center and the Nishizawa Center of Tohoku University. This work was supported in part by JSPS KAKENHI Grant Number 15K17450, and also supported in part by the Special Coordination Funds for Promoting Science and Technology, Formation of Innovation Center for Fusion of Advanced Technologies. Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

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N1 - Funding Information: Part of this work was performed at the Micro/Nanomachining Research Education Center and the Nishizawa Center of Tohoku University. This work was supported in part by JSPS KAKENHI Grant Number 15K17450, and also supported in part by the Special Coordination Funds for Promoting Science and Technology, Formation of Innovation Center for Fusion of Advanced Technologies. Publisher Copyright: © 2017 IEEE.

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N2 - A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is -650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.

AB - A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is -650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.

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KW - temperature coefficient of resonant frequency

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