High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing

研究成果: Conference contribution

抄録

A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is -650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ970-973
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7月 26
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6月 182017 6月 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域Taiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • 化学的な安全衛生
  • 器械工学
  • 電子工学および電気工学

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