High surface accuracy resonant varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane

研究成果: Article査読

抄録

Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.

本文言語English
ページ(範囲)165-170
ページ数6
ジャーナルIEEJ Transactions on Sensors and Micromachines
135
5
DOI
出版ステータスPublished - 2015 5 1

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「High surface accuracy resonant varifocal mirror」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル