High-speed preparation of c-axis-oriented YBa2Cu3O7-δ film by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

研究成果: Article

19 引用 (Scopus)

抜粋

YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.

元の言語English
ページ(範囲)102-104
ページ数3
ジャーナルMaterials Letters
64
発行部数1
DOI
出版物ステータスPublished - 2010 1 15

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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