@article{5e66f64160a34242827aac52ae3f39fb,
title = "High-speed heteroepitaxial growth of 3C-SiC (111) thick films on Si (110) by laser chemical vapor deposition",
abstract = "3C-SiC (111) thick films were grown on Si (110) substrate via laser chemical vapor deposition (laser CVD) using hexamethyldisilane (HMDS) as precursor and argon (Ar) as dilution gas. The 3C-SiC (111) polycrystalline films were prepared at deposition temperature (Tdep) of 1423-1523 K, whereas the 3C-SiC (111) epitaxial films were obtained at 1573-1648 K with the thickness of 5.40 to 9.32 μm. The in-plane relationship was 3C-SiC [-1-12]//Si [001] and 3C-SiC [-110]//Si [-110]. The deposition rates (Rdep) were 16.2-28.0 μm/h, which are 2 to 100 times higher than that of 3C-SiC (111) epi-grown on Si (111) by conventional CVD. The growth mechanism of 3C-SiC (111) epitaxial films has also been proposed.",
keywords = "3C-SiC (111), Si (110), heteroepitaxial growth, laser CVD, orientation",
author = "Qingyun Sun and Peipei Zhu and Qingfang Xu and Rong Tu and Song Zhang and Ji Shi and Haiwen Li and Lianmeng Zhang and Takashi Goto and Jiasheng Yan and Shusen Li",
note = "Funding Information: National Natural Science Foundation of China, Grant/Award Number: 51372188, 51521001; 111 Project, Grant/Award Number: B13035; International Science & Technology Cooperation Program of China, Grant/Award Number: 2014DFA53090; Natural Science Foundation of Hubei Province, Grant/ Award Number: 2016CFA006; Fundamental Research Funds for the Central Universities, Grant/Award Number: 2017II43GX, 2017III032, 2017YB004; Science Challenge Project, Grant/Award Number: TZ2016001 Funding Information: This work was supported by National Natural Science Foundation of China, No.51372188, No.51521001 and the 111 Project (B13035). This research was also supported by the International Science & Technology Cooperation Program of China (2014DFA53090) and the Natural Science Foundation of Hubei Province, China (2016CFA006), and the Fundamental Research Funds for the Central Universities (WUT: 2017II43GX, 2017III032, 2017YB004), and Science Challenge Project (No.TZ2016001). Publisher Copyright: {\textcopyright} 2017 The American Ceramic Society",
year = "2018",
month = mar,
doi = "10.1111/jace.15260",
language = "English",
volume = "101",
pages = "1048--1057",
journal = "Journal of the American Ceramic Society",
issn = "0002-7820",
publisher = "Wiley-Blackwell",
number = "3",
}