Ba 2TiO 4 film was prepared on Pt/Ti/SiO 2/Si substrate by laser chemical vapor deposition. The orientation, microstructure and growth mode were investigated. The single-phase Ba 2TiO 4 film was obtained with (103) preferred orientation at high deposition rate (R dep = 45.6 μm h - 1). The (103)-oriented Ba 2TiO 4 film on Pt (111)/Ti/SiO 2/Si substrate showed the Ba 2TiO 4 //Pt [1-10] growth mode due to the small crystal-lattice mismatch. The surface consisted of rectangular grains, and the cross-section was columnar microstructure.
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