High-speed growth of (103)-oriented Ba 2TiO 4 film by laser chemical vapor deposition

Dongyun Guo, Takashi Goto, Chuanbin Wang, Qiang Shen, Lianmeng Zhang

研究成果: Article査読

11 被引用数 (Scopus)

抄録

Ba 2TiO 4 film was prepared on Pt/Ti/SiO 2/Si substrate by laser chemical vapor deposition. The orientation, microstructure and growth mode were investigated. The single-phase Ba 2TiO 4 film was obtained with (103) preferred orientation at high deposition rate (R dep = 45.6 μm h - 1). The (103)-oriented Ba 2TiO 4 film on Pt (111)/Ti/SiO 2/Si substrate showed the Ba 2TiO 4 [103]//Pt [1-10] growth mode due to the small crystal-lattice mismatch. The surface consisted of rectangular grains, and the cross-section was columnar microstructure.

本文言語English
ページ(範囲)135-137
ページ数3
ジャーナルMaterials Letters
70
DOI
出版ステータスPublished - 2012 3 1

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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