High speed deposition of YSZ films by laser chemical vapor deposition

Teiichi Kimura, Takashi Goto

研究成果: Conference article

抜粋

Partially yttria-stabilized zirconia (YSZ) films were prepared by laser chemical vapor deposition (LCVD). The assistance of laser increased the deposition rate for YSZ films up to 660 μm/h. The increase in the deposition rate was accompanied by plasma formation around the deposition zone, and the plasma was observed over critical laser power and substrate pre-heating temperature. A wide variety of morphologies of films from feather-like columnar to dense textures were obtained depending on deposition conditions. The columnar texture contained a large amount of nano-pores at columnar boundary and inside grains. These columnar texture and nano-pores were advantageous for applying YSZ films to thermal barrier coatings.

元の言語English
ページ(範囲)3-12
ページ数10
ジャーナルCeramic Transactions
195
出版物ステータスPublished - 2006 7 26
イベント6th Pacific Rim Conference on Ceramic and Glass Technology, PacRim6 - Maui, HI, United States
継続期間: 2005 9 112005 9 16

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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