High-speed and large-amplitude resonant varifocal mirror

Takashi Sasaki, Takuro Kamada, Kazuhiro Hane

研究成果: Article査読

1 被引用数 (Scopus)

抄録

We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.

本文言語English
ページ(範囲)344-350
ページ数7
ジャーナルJournal of Robotics and Mechatronics
32
2
DOI
出版ステータスPublished - 2020

ASJC Scopus subject areas

  • コンピュータ サイエンス(全般)
  • 電子工学および電気工学

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