High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in A1N thin films

Yuki Tokumoto, Naoya Shibata, Teruyasu Mizoguchi, Masakazu Sugiyama, Yukihiro Shimogaki, Jung Seung Yang, Takahisa Yamamoto, Yuichi Ikuhara

    研究成果: Article査読

    11 被引用数 (Scopus)

    抄録

    The structure and configuration of threading dislocations (TDs) in AIN films grown on (0001) sapphire by metal-organic vapor phase epitaxy (MOVPE) were characterized by high-resolution transmission electron microscopy (HRTEM). It was found that the TDs formed in the films were mainly the perfect edge dislocations with the Burgers vector of b = 1/ 3(1120). The majority of the edge TDs were not randomly formed but densely arranged in lines. The arrays of the edge TDs were mainly observed on the {1120} and {1010} planes. These two planes showed different configurations of TDs. TD arrays on both of these planes constituted low-angle boundaries. We suggest that these TDs are introduced to compensate for slight misorientations between the subgrains during the film growth.

    本文言語English
    ページ(範囲)2188-2194
    ページ数7
    ジャーナルJournal of Materials Research
    23
    8
    DOI
    出版ステータスPublished - 2008 8月

    ASJC Scopus subject areas

    • 材料科学(全般)
    • 凝縮系物理学
    • 材料力学
    • 機械工学

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