TY - JOUR
T1 - High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide
AU - Shimizu, Yuki
AU - Kataoka, Satoshi
AU - Gao, Wei
N1 - Funding Information:
YS was in charge of the whole trial; SK assisted with sampling and laboratory analyses; and YS and WG wrote the manuscript. All authors read and approved the final manuscript. Yuki Shimizu received his bachelor and MS degrees from Tohoku University, Japan , in 2000 and in 2002, respectively. He received his PhD degree from Department of Mechanical Engineering, Nagoya University, Japan , in 2009. He is currently an associate professor at Nano -Metrology and Control Laboratory, Department of Finemechanics, Tohoku University, Japan. Satoshi Kataoka is currently a master candidate at Nano -Metrology and Control Laboratory, Department of Finemechanics, Tohoku University, Japan. Wei Gao received his bachelor degree in precision engineering from Shanghai Jiao Tong University, China , in 1986 and MS and PhD degrees in engineering from Tohoku University, Japan , in 1991 and 1994, respectively. He is currently a professor and a director of Research Center for Precision Nanosystems, Department of Finemechanics, Tohoku University, Japan. His research interests include optical sensors, precision dimensional metrology and motion control. He is a member of JSPE, JSME, CIRP and a Fellow of The International Society for Nanomanufacturing. He is serving as the Chairman of The Scientific Technical Committee Precision Engineering and Metrology of CIRP. He is the author of the book Precision Nanometrology published by Springer. This project was supported by Japan Society for the Promotion and Science (JSPS). The authors would like to thank Mr. Satoshi Nakagawa for his valuable comments and suggestions on our experiments. The authors declare that they have no competing interests. Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Funding Information:
This project was supported by Japan Society for the Promotion and Science (JSPS). The authors would like to thank Mr. Satoshi Nakagawa for his valuable comments and suggestions on our experiments.
Publisher Copyright:
© 2018, The Author(s).
PY - 2018/12/1
Y1 - 2018/12/1
N2 - This paper proposes a new method for measurement of the roll error motion of a slide table in a precision linear slide. The proposed method utilizes a pair of clinometers in the production process of a precision linear slide, where the roll error motion measurement will be carried out repeatedly to confirm whether the surface form errors of slide guideways in the linear slide are sufficiently corrected by hand scraping process. In the proposed method, one of the clinometers is mounted on the slide table, while the other is placed on a vibration isolation table, on which the precision linear slide is mounted, so that influences of external disturbances can be cancelled. An experimental setup is built on a vibration isolation table, and some experiments are carried out to verify the feasibility of the proposed method.
AB - This paper proposes a new method for measurement of the roll error motion of a slide table in a precision linear slide. The proposed method utilizes a pair of clinometers in the production process of a precision linear slide, where the roll error motion measurement will be carried out repeatedly to confirm whether the surface form errors of slide guideways in the linear slide are sufficiently corrected by hand scraping process. In the proposed method, one of the clinometers is mounted on the slide table, while the other is placed on a vibration isolation table, on which the precision linear slide is mounted, so that influences of external disturbances can be cancelled. An experimental setup is built on a vibration isolation table, and some experiments are carried out to verify the feasibility of the proposed method.
KW - Clinometer
KW - Linear slide
KW - Rotational error motion measurement
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U2 - 10.1186/s10033-018-0294-6
DO - 10.1186/s10033-018-0294-6
M3 - Article
AN - SCOPUS:85070790893
VL - 31
JO - Chinese Journal of Engineering Design
JF - Chinese Journal of Engineering Design
SN - 1000-9345
IS - 1
M1 - 92
ER -