High mobility exceeding 80cm2 V-1 s-1 in polycrystalline Ta-Doped SnO2 thin films on glass using anatase TiO2 seed layers

Shoichiro Nakao, Naoomi Yamada, Taro Hitosugi, Yasushi Hirose, Toshihiro Shimada, Tetsuya Hasegawa

    研究成果: Article査読

    39 被引用数 (Scopus)


    High-mobility Ta-doped SnO2 (TTO) thin films were grown on glass substrates by pulsed laser deposition using a seed-layer technique. The use of 10-nm-thick polycrystalline anatase TiO2 seed layers was found to lead to the preferred growth of (200)-oriented TTO films, resulting in a 30% increase in the carrier density and a more than two times increase in mobility, compared to films grown directly on the glass substrates. The highest mobility obtained was 83 cm2 V-1 s-1 with a resistivity of 2:8 × 10-4 Ωcm, whereas the film with the lowest resistivity of 1:8 × 10-4 Ωcm had a mobility of 60 cm2 V-1 s-1.

    ジャーナルApplied Physics Express
    出版ステータスPublished - 2010 3

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)


    「High mobility exceeding 80cm<sup>2</sup> V<sup>-1</sup> s<sup>-1</sup> in polycrystalline Ta-Doped SnO<sub>2</sub> thin films on glass using anatase TiO<sub>2</sub> seed layers」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。