A YBa2Cu3O7-δ (YBCO) film was prepared on a multilayer-coated Hastelloy C276 substrate by laser-assisted metalorganic chemical vapor deposition using a single liquid source precursor. A c-axis-oriented YBCO film was grown epitaxially on a (100) CeO2 layer at a deposition rate of 11 μm h-1. A screw dislocation and stacking faults were observed in the cross-section of the YBCO film. The critical current density of the YBCO film reached 2.7 MA cm-2.
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