High-Gauge Factor Strain Sensor Based on Piezoelectric Aluminum Nitride Coupled to MOSFET
Minjie Zhu, Naoki Inomata, Nobuyoshi Adachi, Atsushi Sakurai, Masanobu Nomura, Takahito Ono
研究成果: Article › 査読
11
被引用数
(Scopus)