High-aspect-ratio and self-sensing probe for AMF based on micro-fabrication

Gaofa He, Wei Gao

研究成果: Conference contribution

抄録

The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever's dynamic and static performance.

本文言語English
ホスト出版物のタイトルEquipment Manufacturing Technology and Automation
ページ1645-1648
ページ数4
DOI
出版ステータスPublished - 2011
イベント2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011 - Guangzhou, China
継続期間: 2011 9 162011 9 18

出版物シリーズ

名前Advanced Materials Research
317-319
ISSN(印刷版)1022-6680

Other

Other2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011
CountryChina
CityGuangzhou
Period11/9/1611/9/18

ASJC Scopus subject areas

  • Engineering(all)

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