High accuracy high spatial resolution and real-time CMOS proximity capacitance image sensor technology and its applications

Rihito Kuroda, Masahiro Yamamoto, Yuki Sugama, Yoshiaki Watanabe, Manabu Suzuki, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Yayoi Yokomichi, Hiroshi Hamori, Shigetoshi Sugawa

研究成果: Article査読

抄録

This paper presents a CMOS proximity capacitance image sensor technology achieving 0.1aF detection accuracy with high spatial resolution with real-time imaging capability for industrial, life science, and biometric applications. The proposed image sensor circuits, its working principle and device structures are described in this paper, and additionally, we discuss the foreseen technology roadmap. The fabricated chips with 16µm pitch pixels achieved a 0.1aF detection accuracy with the input voltage of 20V, thanks to the employed noise reduction technology. The examples of capacitance imaging using the fabricated CMOS proximity capacitance image sensor are demonstrated.

本文言語English
ページ(範囲)122-127
ページ数6
ジャーナルITE Transactions on Media Technology and Applications
9
2
DOI
出版ステータスPublished - 2021

ASJC Scopus subject areas

  • 信号処理
  • メディア記述
  • コンピュータ グラフィックスおよびコンピュータ支援設計

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